| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate capable of shortening the tact time of defect correction of a wiring pattern, and a substrate manufacturing system, and a method for manufacturing a display device. SOLUTION: The results of an electricity inspection of a first inspection step and an optical inspection of a second inspection step are collated in a collation step and the critical defect 181 of electric shorting or disconnection is specified. Then, in a third inspection step, the relative positions (X181, Y181) within the pixels of the critical defect 181 and an effective range 2 is examined. As compared to the case only the relative position of the defect like heretofore, the selection of more optimum correction procedures is made possible. The selection of the correction procedures is preferably performed based on the information on the lower layer of the pixel including the critical defect 181. More particularly, in the case that the presence of scanning wiring 130A within the effective range of the critical defect 181 is discriminated, the reading out of at least the connection procedures as the correction procedure A1 is preferable. COPYRIGHT: (C)2009,JPO&INPIT
|
