发明名称 Substrate with Feedthrough and Method for Producing the Same
摘要 A substrate with first and second main surfaces includes at least one channel extending from the first main surface to the second main surface. The at least one channel includes a first cross-sectional area at a first location and a second cross-sectional area at a second location. An electrically conductive first material is disposed in the at least one channel.
申请公布号 US2008268638(A1) 申请公布日期 2008.10.30
申请号 US20070751396 申请日期 2007.05.21
申请人 INFINEON TECHNOLOGIES AG;QIMONDA AG 发明人 DERTINGER STEPHAN;MARTIN ALFRED;HASLER BARBARA;SOMMER GRIT;BINDER FLORIAN
分类号 H01L21/44;H01L23/48 主分类号 H01L21/44
代理机构 代理人
主权项
地址