发明名称 |
METHOD AND APPARATUS FOR TRANSPORTING A SUBSTRATE USING NON-NEWTONIAN FLUID |
摘要 |
A method for transporting a substrate is provided. In this method, a non-Newtonian fluid is provided and the substrate is suspended in the non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the substrate. Thereafter, a supply force is applied on the non-Newtonian fluid to cause the non-Newtonian fluid to flow, whereby the flow is capable of moving the substrate along a direction of the flow. Apparatuses and systems for transporting the substrate using the non-Newtonian fluid also are described.
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申请公布号 |
US2008267721(A1) |
申请公布日期 |
2008.10.30 |
申请号 |
US20080173661 |
申请日期 |
2008.07.15 |
申请人 |
DE LARIOS JOHN M;RAVKIN MIKE;PARKS JOHN;KOROLIK MIKHAIL;REDEKER FRED C |
发明人 |
DE LARIOS JOHN M.;RAVKIN MIKE;PARKS JOHN;KOROLIK MIKHAIL;REDEKER FRED C. |
分类号 |
B65G51/01 |
主分类号 |
B65G51/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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