Storage capacitor for use in e.g. memory cell of dynamic RAM, has conductive material which is provided at distance from capacitor electrode by capacitor dielectric and is extended over lower part of outer side of electrode

摘要

The capacitor (20) has a cup-shaped capacitor electrode (21) with inner and outer sides (213, 214), and a capacitor dielectric (22) arranged on the inner and outer sides. Another capacitor electrode (23) is spaced apart from the capacitor electrode (21) by the dielectric and is arranged along the inner side and an upper part (215) of the outer side. A conductive material (24) is provided at a distance from the electrode (21) by the dielectric and is extended over a lower part (216) of the outer side. The conductive material is different from the material of the electrode (23). Independent claims are also included for the following: (1) a method for manufacturing a storage capacitor (2) a method for manufacturing a memory device.