MICROMIRROR ELEMENT AND MICROMIRROR ARRAY

摘要

A movable beam (182a) and a movable beam (182b), each of which has one en d fixed to a frame section (181), are arranged inside the frame section (181 ) of a mirror substrate (108). Each of the movable beam (182a) and the movab le beam (182b) has the one end fixed to each of the two facing sides inside the frame section (181), and the beams are arranged at a prescribed interval on the same line in a direction where the two sides face each other. Furthe rmore, each of the movable beam (182a) and the movable beam (182b) has the o ther end displaceable in the normal line direction of the mirror substrate ( 108), and has a cantilever structure. A mirror (183) is arranged between the movable beam (182a) and the movable beam (182b) by being connected to a pai r of connecting sections (109a, 109b).