| 摘要 |
<p>A noncontact form measuring apparatus emits a laser beam L . In the apparatus, a prism bends the laser beam into an X-axis direction, so that a Z-axis displacement of an objective optical system is converted by the prism into an X-axis displacement on a measurement coordinate system. A movement of an X-axis stage is converted into a Z-axis displacement on the measurement coordinate system. The apparatus moves an internal gear as a measurement object and the prism, reads X, Y, and Z coordinates at each focal point, and measures a three-dimensional form of inner teeth of the internal gear. The apparatus may translate the internal gear in a Y-axis direction, to measure a partial form of the inner teeth. The apparatus may turn the internal gear in an angular ¸-direction, to measure a whole circumferential form of the inner teeth.</p> |
