发明名称 Method for fabricating a buried metallic layer in a semiconductor body and semiconductor component having a buried metallic layer
摘要 A method for fabricating a buried metallic layer at a predetermined vertical position in a semiconductor body having a first and second side includes a step of applying a metal layer to one of the first and second sides at least in sections. The method also includes establishing a positive temperature gradient in a vertical direction of the semiconductor body proceeding from the one side. The temperature in the region of the one side is higher than the eutectic temperatures of system, so that the metal of the metal layer migrates in the vertical direction into the semiconductor body. The method also includes discontinuing the temperature gradient once the metal reaches the predetermined vertical position in the semiconductor body, in order thereby to obtain the metallic layer at the predetermined position.
申请公布号 US7439198(B2) 申请公布日期 2008.10.21
申请号 US20050153239 申请日期 2005.06.15
申请人 INFINEON TECHNOLOGIES AG 发明人 SCHULZE HANS-JOACHIM;STRACK HELMUT
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利