发明名称 |
Sensor for detecting substance in liquid and apparatus for detecting substance in liquid using the same |
摘要 |
In a sensor for detecting a substance in liquid, recesses are provided in the upper surface of a base substrate. The recesses respectively accommodate SAW elements. A resin layer having openings is arranged such that the sensing portions at the upper surfaces of the SAW elements are exposed in the openings. A reaction film made of a material capable of binding to a target substance is also arranged so as to cover the sensing portion of at least one of the SAW elements. A liquid containing a target substance is fed from the openings.
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申请公布号 |
US7437907(B2) |
申请公布日期 |
2008.10.21 |
申请号 |
US20070683021 |
申请日期 |
2007.03.07 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
KIMURA TETSUYA;FUJIMOTO KOJI;OKAGUCHI KENJIRO |
分类号 |
G01N29/036;H01L41/08 |
主分类号 |
G01N29/036 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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