发明名称 MULTI-LAYER SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
摘要 A method for manufacturing a multi-layer semiconductor structure is disclosed. First, a first wafer comprising a first semiconductor device structure and a second wafer comprising a substrate and a single crystal silicon layer are provided, and the first and second wafers are combined in which a surface of the first wafer having the first semiconductor device structure is in contact with a surface of the second wafer having the single crystal silicon layer. A glue layer and a dielectric layer can be employed to combine the first and second wafers. Afterwards, a process for manufacturing a second semiconductor device structure is performed on the single crystal silicon layer.
申请公布号 US2008251826(A1) 申请公布日期 2008.10.16
申请号 US20070747527 申请日期 2007.05.11
申请人 PROMOS TECHNOLOGIES INC. 发明人 LEE JACK;LU HERBERT;LIU MARVIN;PONG PETER
分类号 H01L27/108;H01L21/46 主分类号 H01L27/108
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