摘要 |
A method for manufacturing a multi-layer semiconductor structure is disclosed. First, a first wafer comprising a first semiconductor device structure and a second wafer comprising a substrate and a single crystal silicon layer are provided, and the first and second wafers are combined in which a surface of the first wafer having the first semiconductor device structure is in contact with a surface of the second wafer having the single crystal silicon layer. A glue layer and a dielectric layer can be employed to combine the first and second wafers. Afterwards, a process for manufacturing a second semiconductor device structure is performed on the single crystal silicon layer.
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