| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper and a master for magnetic transfer for improving releasability and pattern accuracy compatibly and to provide the stamper and the master for magnetic transfer manufactured by the manufacturing method. SOLUTION: In the manufacturing method of the stamper including a process for forming a metal thin film 61 on a stamper original plate 50 on which a rugged pattern is formed by etching and then performing electroplating, before the metal thin film 61 is formed, the stamper original plate 50 is heat-treated at 200 to 500°C in air. COPYRIGHT: (C)2009,JPO&INPIT
|
