| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of hunting or the like even in a control object with strong interference, in temperature control or the like using a gradient temperature (temperature difference). SOLUTION: A temperature controller comprises a controller Cg of an inclining mode for computing an operation amount based on the gradient temperature which is the temperature difference, and a controller Ca of an average mode for computing the operation amount based on an average temperature. Decoupling devices Fg, Fa of the inclining mode and average mode are provided for adjusting the operation amounts of the respective controllers Cg, Ca of the inclining mode and average mode to cancel the interference based on the gradient temperature. COPYRIGHT: (C)2009,JPO&INPIT
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