| 发明名称 |
A head electrode region of a beam for an electromechanical device |
| 摘要 |
A head electrode region of a beam for an electromechanical device comprising: a first insulating layer having electrode region edges; and a head electrode, where the head electrode comprises a locking portion, with the locking portion surrounding the electrode region edges of the first insulating layer such that the head electrode is held fixed relative to the first insulating layer. |
| 申请公布号 |
GB2448446(A) |
申请公布日期 |
2008.10.15 |
| 申请号 |
GB20080013331 |
申请日期 |
2005.02.17 |
| 申请人 |
WIRELESS MEMS INCORPORATED |
发明人 |
CHIA-SHING CHOU |
| 分类号 |
H01H11/00;B44C1/22;B81B3/00;B81C1/00;C03C15/00;C03C25/68;C23F1/00;H01H1/00;H01H51/22;H01H57/00;H01H59/00;H01L21/00;H01L31/00;H01P1/10 |
主分类号 |
H01H11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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