Transparent electrode film based on indium oxide with titanium and tungsten admixtures and manufacturing method thereof

摘要

A transparent oxide electrode film is provided to have crystalline indium oxide as its main component, in which the indium in the indium oxide is substituted with titanium and tungsten at a ratio which when the titanium/indium ratio is deemed x and the tungsten/indium ratio is deemed y, satisfies an equation (1), 0.019 - 1.90 x ‰ y ‰ 0.034 - 0.28 �¢ x and the resistivity of the transparent oxide electrode film is 5.7 x 10 -4 ©cm or less, so as to provide excellent transmittance for both the visible light region and the infrared light region, and low resistivity.