| 摘要 |
A substrate (5; 42) can efficiently be manufactured by separating the alignment and the actual processing when an alignment mark (6a, 6b; 12a...d; 44a...c) is provided, which is fixed with respect to the substrate (5; 42) and when position information on a position of a process area on the substrate (5; 42) is retrieved with respect to the alignment mark (6a, 6b; 12a...d; 44a...c) before the substrate (5; 42) is processed. During the processing alignment can then be performed by redetermining the position of the alignment mark (6a, 6b; 12a...d; 44a...c) only once and by using the stored position information on the position of the process area. |
