TRANSFERRING APPARATUS OF SUBSTRATE

摘要

A substrate conveyer is provided to supply a developing solution from a first chamber to a second chamber by providing a third conveying portion forming a slope conveying section for removing liquid from the developing solution between a first conveying portion and a second conveying portion. A substrate conveyer includes a first conveying portion(6), a second conveying portion(8), a third conveying portion(10), and a conveying controller(12). The first conveying portion conveys a substrate. The second conveying portion is spaced apart from an end of the first conveying portion. One of the third conveying portion is hinged between the first conveying portion and the second conveying portion. The third conveying portion removes liquid from a developing solution during conveyance of a substrate. The third conveying portion has a first variable conveying portion(10A) and a second variable conveying portion(10B) defining a variable slope conveying section capable of adjusting a slope conveying angle and a connection shape. The conveying controller controls the slope conveying angle and the connection shape while rotating the first variable conveying portion and the second variable conveying portion based on a hinge connection.