| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas-water separation device excellent in muffling effect while miniaturizing the device. SOLUTION: This gas-water separation device is provided with a gas-water separation part 6 connected to a delivery piping of a vacuum pump and separating gas-water mixture discharged from the vacuum pump, and a muffling part 7 installed adjacently to an upper part of the gas-water separation part and attenuating delivery noise. The muffling part 7 is divided into a first muffling chamber 7a and a second muffling chamber 7b along a gas flow direction, a wall surface distance of the first muffling chamber 7a is set to 1/4 of basic wavelength λ of reference delivery noise and a wall surface distance of the second muffling chamber 7b is set to 1/8 of basic wavelength λ of reference delivery noise. COPYRIGHT: (C)2009,JPO&INPIT |
