| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To measure gas concentration in the air, before and after adsorption using a single concentration meter 15, when gas of an organic solvent included in the air is adsorbed by an activated carbon adsorption tank 6. <P>SOLUTION: A control part 23 connected to a pre-adsorption air channel in front of the adsorption tank 6, a post-adsorption air channel after the adsorption tank 6, and a clean air channel from a clean air supply channel 16 for supplying clean air, through on-off valves 10, 11, 19 capable of opening/closing each channel, respectively, for opening/closing the on-off valves, outputs an opening/closing control instruction so that the order of pre-adsorption air, clean air, and post-adsorption air is repeated, and performs concentration measurement at each time. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
