发明名称 |
METHOD FOR COMPOSITION CONTROL OF A METAL COMPOUND FILM |
摘要 |
Measurement of the extinction coefficient k is employed for effective and prompt in-line monitoring and/or controlling of the metal film composition. The dependency of the extinction coefficient on the composition of a metal compound is characterized by measuring the extinction coefficients of a series of the metal compound with different compositions. A monitor metal film is then deposited on a wafer. The extinction coefficient k of the film on the wafer is measured and a film compositional parameter is extracted. The wafer processing may continue if k is in specification or the needed compositional change in the film may be extracted from the measured value of the k and the established dependence of k on the composition of the film for out-of-spec k values.
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申请公布号 |
US2008249650(A1) |
申请公布日期 |
2008.10.09 |
申请号 |
US20070696507 |
申请日期 |
2007.04.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ALLEN RUSSELL D.;BROWN STEPHEN L.;CALLEGARI ALESSANDRO C.;CHUDZIK MICHAEL P.;NARAYANAN VIJAY;PARUCHURI VAMSI K. |
分类号 |
G06F19/00;G01N21/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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地址 |
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