| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for supplying a gaseous precursor while avoiding condensation, and to provide a delivery device provided with a flow rate monitoring arrangement. SOLUTION: The supply apparatus comprises a vacuum pump 2 for evacuation a storage vessel 3 for a precursor which is solid and/liquid at a room temperature or under an atmospheric pressure and feeding the gaseous precursor vaporized by the evacuation, a first line section 23 on an inlet side of the vacuum pump 2 in order to provide a connection between the vacuum pump 2 and the storage vessel 3 for the solid and/or liquid precursor, at least one first line section 23 on the inlet side of the vacuum pump 2 and at least a second line section 24 for supplying a carrier gas to the vacuum pump 2. The apparatus can be connected to the first line section 23 and the second line section 24, and supplies the gaseous precursor while avoiding the condensation by maintaining the partial pressure of the gaseous precursor lower than the saturation vapor pressure after at least the pumping is started during the operation of the apparatus. COPYRIGHT: (C)2009,JPO&INPIT |
