| 摘要 |
PROBLEM TO BE SOLVED: To provide a functional liquid supply device capable of precisely detecting the liquid level of the functional liquid in a sub-tank. SOLUTION: The functional liquid supply device is equipped with a main tank 181 for storing the functional liquid, the sub-tank 121 for supplying the functional liquid to a functional liquid droplet discharge head 17 while holding the head value between the functional liquid droplet discharge head 17 and the sub-tank 121 in a predetermined allowable range, a functional liquid replenishing means for replenishing the sub-tank 121 with the functional liquid from the main tank 181, a liquid level detection sensor 177 for detecting the reference liquid level of the sub-tank 121, a control part 197 for controlling the replenishment of the sub-tank 121 with the functional liquid so that the reference liquid level of the sub-tank 121 is in the allowable range and an air bubble removing unit 135 provide to an upstream functional liquid flow channel 126 to remove microbubbles in the functional liquid in order to inhibit the occurrence of air bubbles on the liquid surface of the sub-tank 121. COPYRIGHT: (C)2009,JPO&INPIT |
