SEMICONDUCTOR DEVICE INCLUDING AN AMORPHOUS NITRIDED SILICON ADHESION LAYER AND METHOD OF MANUFACTURE THEREFOR
摘要
<p>Provided is a method for manufacturing a semiconductor device (100). The method for manufacturing the semiconductor device, without limitation, includes forming a first semiconductor layer (120) over a substrate (110), and forming a second semiconductor layer (140) over the first semiconductor layer, wherein an amorphous nitrided silicon adhesion layer (130) is located between and adheres the first and second semiconductor layers.</p>
申请公布号
WO2008121925(A2)
申请公布日期
2008.10.09
申请号
WO2008US58833
申请日期
2008.03.31
申请人
TEXAS INSTRUMENTS INCORPORATED;WANG, MARIA;SHOEMAKER, ERIKA, LEIGH;ROBY, MARY;JACOBSEN, STUART
发明人
WANG, MARIA;SHOEMAKER, ERIKA, LEIGH;ROBY, MARY;JACOBSEN, STUART