发明名称 SEMICONDUCTOR DEVICE INCLUDING AN AMORPHOUS NITRIDED SILICON ADHESION LAYER AND METHOD OF MANUFACTURE THEREFOR
摘要 <p>Provided is a method for manufacturing a semiconductor device (100). The method for manufacturing the semiconductor device, without limitation, includes forming a first semiconductor layer (120) over a substrate (110), and forming a second semiconductor layer (140) over the first semiconductor layer, wherein an amorphous nitrided silicon adhesion layer (130) is located between and adheres the first and second semiconductor layers.</p>
申请公布号 WO2008121925(A2) 申请公布日期 2008.10.09
申请号 WO2008US58833 申请日期 2008.03.31
申请人 TEXAS INSTRUMENTS INCORPORATED;WANG, MARIA;SHOEMAKER, ERIKA, LEIGH;ROBY, MARY;JACOBSEN, STUART 发明人 WANG, MARIA;SHOEMAKER, ERIKA, LEIGH;ROBY, MARY;JACOBSEN, STUART
分类号 H01L21/469;H01L21/4763;H01L23/48 主分类号 H01L21/469
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