SELF ALIGNED PORT HOLE OPENING PROCESS FOR INK JET PRINT HEADS

摘要

PROBLEM TO BE SOLVED: To open many port holes on the surface at a side opposite to outlet apertures so that high resolution printing can be performed and ink leakage and clogging may not occur.

SOLUTION: On the port hole opening surface prepared is a jet stack 102 so that a plurality of the port holes 106 are opened. A piezoelectric array 110 which is planarized by filling the space between the piezoelectric elements with a polymer is adhered to the port hole opening surface of the stack 102 so that the opening of the port holes 106 may be closed by the polymer between the elements. The port holes 106 are extended through the polymer between the elements by partially ablating the polymer between the elements from the outlet aperture surface side of the stack 102 using a laser beam and using the stack 102 as a mask. An opening plate 130 is adhered to the outlet aperture surface side of the stack 102 to form an outlet port second section 138 which communicates with via holes 142 of a circuit board 140 through the port holes 106.

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