| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus which can directly obtain a fact whether a mounting table has reached the amount of overdrive or not even when an inspected body and a probe card touch collectively. SOLUTION: The inspection apparatus 10 comprises a mounting table 11, a probe card 12 and a controller 14, and under control of the controller 14, the mounting table 11 is overdriven to electrically touch a wafer W and the probe card 12 collectively. In such an apparatus for inspecting the electrical characteristics of the wafer W, displacement sensors 20 for measuring the distance between the mounting surface of the mounting table 11 and the lower surface of the card holder 15 of probe card are provided at three positions on the outside at the outer circumferential edge of the mounting table 11, and the controller 14 controls the amount of elevation of the mounting table 11 based on the measurement of the displacement sensor 20. COPYRIGHT: (C)2009,JPO&INPIT
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