MIKROMECHANISCHE STRUKTUR, INSBESONDERE FÜR EINEN TSPRECHENDES HERSTELLUNGSVERFAHREN

摘要

A micromechanical structure and a corresponding manufacturing method are described. The structure includes a substrate (10), which has an anchoring device (20), and a centrifugal mass (30), which is connected to the anchoring device (20) via a flexible spring device (40), so that the centrifugal mass (30) is elastically deflectable from its rest position. The centrifugal mass (30) has clearances and is designed to be deflectable by etching a sacrificial layer (50) underneath it. The sacrificial layer (50) is present in a first area located underneath the centrifugal mass (30) with a first etchable thickness (d1), and in a second area located underneath the centrifugal mass (30) with a second etchable thickness (d1+d2+d3), the second thickness being greater than the first thickness (d1). The centrifugal mass (30) is structured in the first area so that in etching only a maximum of two etching fronts may come together in order to limit the etching residue deposits.