TI, TA, HF, ZR AND RELATED METAL SILICON AMIDES FOR ALD/CVD OF METAL-SILICON NITRIDES, OXIDES OR OXYNITRIDES,申请号KR20060097693-传众专利搜索

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发明名称	TI, TA, HF, ZR AND RELATED METAL SILICON AMIDES FOR ALD/CVD OF METAL-SILICON NITRIDES, OXIDES OR OXYNITRIDES
摘要
申请公布号	KR100862263(B1)	申请公布日期	2008.10.09
申请号	KR20060097693	申请日期	2006.10.04
申请人		发明人
分类号	C07F7/10;C07F7/08	主分类号	C07F7/10
代理机构		代理人
主权项
地址

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