| 摘要 |
An outer appearance inspection apparatus for a glass substrate is provided to detect mura with respect to green and blue color filter layers, a column spacer layer and a TFT(Thin Film Transistor) layer. An upward lighting unit(330) supplies reflection light sources to the surface of an inspection substrate to inspect whether a defect is present on the surface of the inspection substrate. A backward lighting unit(340) supplies transmitting light sources in the rear of the inspection substrate to inspect whether a defect is present within the inspection substrate. A rear surface plate(360) of a lattice shape is installed in the rear surface of the inspection substrate. A driving guide(370) is in the rear surface of the rear surface plate, and generates retardation to light provided from the upward and backward lighting units.
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