| 发明名称 |
Methods and Apparatus for Providing a High Purity Acetylene Product |
| 摘要 |
Methods and apparatus for the purification and distribution of acetylene. Acetylene is removed from an acetylene storage device, and provided to a purifier where solvent is removed. The purified acetylene is then provided to a semiconductor processing tool.
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| 申请公布号 |
US2008242912(A1) |
申请公布日期 |
2008.10.02 |
| 申请号 |
US20070942361 |
申请日期 |
2007.11.19 |
| 申请人 |
LETESSIER OLIVIER;UDISCHAS RICHARD J;MCANDREW JAMES J F;ZILS REGIS;DELCORSO FABRICE;AGRAWAL RAJAT |
发明人 |
LETESSIER OLIVIER;UDISCHAS RICHARD J.;MCANDREW JAMES J.F.;ZILS REGIS;DELCORSO FABRICE;AGRAWAL RAJAT |
| 分类号 |
C07C7/12;B01D35/18;B01D35/30 |
主分类号 |
C07C7/12 |
| 代理机构 |
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