| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems of causing an increase in the amount of necessary data, increase in required operation time and communication time, and further increase in costs for apparatus with diversification in sizes, kinds, or processes of substrates. SOLUTION: Basic data are expressed with a plurality of unit patterns and the number of times of repeat. For the basic data, data corresponding to various coating methods are generated by processes which hardly generate an operation load such as bit mask and bit shift. COPYRIGHT: (C)2009,JPO&INPIT
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