发明名称 |
SUB-10 NM LINE FEATURES VIA RAPID GRAPHOEPITAXIAL SELF-ASSEMBLY OF AMPHIPILIC MONOLAYERS |
摘要 |
Methods for fabricating sublithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided. |
申请公布号 |
WO2008118635(A2) |
申请公布日期 |
2008.10.02 |
申请号 |
WO2008US56584 |
申请日期 |
2008.03.12 |
申请人 |
MICRON TECHNOLOGY, INC.;MILLWARD, DAN, B. |
发明人 |
MILLWARD, DAN, B. |
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