发明名称 SUB-10 NM LINE FEATURES VIA RAPID GRAPHOEPITAXIAL SELF-ASSEMBLY OF AMPHIPILIC MONOLAYERS
摘要 Methods for fabricating sublithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.
申请公布号 WO2008118635(A2) 申请公布日期 2008.10.02
申请号 WO2008US56584 申请日期 2008.03.12
申请人 MICRON TECHNOLOGY, INC.;MILLWARD, DAN, B. 发明人 MILLWARD, DAN, B.
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