PLASMA DISCHARGE METHOD BY PRESSURE GRADIENT TYPE PLASMA GUN,申请号JP19910249340-传众专利搜索

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发明名称	PLASMA DISCHARGE METHOD BY PRESSURE GRADIENT TYPE PLASMA GUN
摘要
申请公布号	JPH0586468(A)	申请公布日期	1993.04.06
申请号	JP19910249340	申请日期	1991.09.27
申请人	CHUGAI RO CO LTD	发明人	OKADA KEN
分类号	C23C14/32;C23C14/52;C23C16/50;C23C16/52	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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