THIN-FILM TRANSISTOR AND THIN-FILM TRANSISTOR SUBSTRATE AND PRODUCTION METHODS FOR THEM AND LIQUID CRYSTAL DISPLAY UNIT USING THESE AND RELATED DEVICE AND METHOD, AND, SPUTTERING TARGET AND TRANSPARENT CONDUCTIVE FILM FORMED BY USING THIS AND TRANSPARENT ELECTRODE AND RELATED DEVICE AND METHOD

摘要

Provided are a thin film transistor substrate having a transparent electroconductive film in which residues and so on resulting etching are hardly generated; a process for producing the same; and a liquid crystal display using this thin film transistor substrate. A thin film transistor substrate, comprising a transparent substrate,
a source electrode formed over the transparent substrate, a drain electrode formed over the transparent substrate, and a transparent pixel electrode formed over the transparent substrate, wherein the transparent pixel electrode is a transparent electroconductive film which is made mainly of indium oxide, and further comprises one or two or more oxides selected from tungsten oxide, molybdenum oxide, nickel oxide and niobium oxide, and the transparent pixel electrode is electrically connected to the source electrode or the drain electrode; a process for producing the same; and a liquid crystal display using this thin film transistor substrate.