| 摘要 |
PROBLEM TO BE SOLVED: To quickly discharge pressure air from an atmospheric releasing port when separating a workpiece by supplying air pressure for vacuum breaking to a suction part for workpiece holding. SOLUTION: A three-port switching valve 30 for vacuum breaking communicates a supply port 31G with a pressure air supply port P1 of a device main body 10, passes through internal passages 10a and 10e of the device main body 10, passes through an internal passage 21G of a valve main body 21 of a three-port switching valve 20 for vacuum supply, is communicated with an output port P2 connected to a suction side via a valve member 23, and opens a discharge port P4 to a side surface on the same side as the pressure air supply port P1 of the device main body 10 to be opened in the atmosphere. A three-port switching valve 20 for vacuum supply opens a vacuum supply port P3 and the output port P2 to be connected to a vacuum source V to a side surface on the same side as the pressure air supply port P1 of the device main body 10 and a discharge port P4 of the three-port switching valve 30. COPYRIGHT: (C)2008,JPO&INPIT
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