| 摘要 |
PROBLEM TO BE SOLVED: To provide a device of inspecting a test object for accurately determining and inspecting the boundary position between the plane region of the surface of the test object irradiated with a laser beam and a predetermined region corresponding to an edge part. SOLUTION: This device of inspecting the test object comprises a laser light source 31 for irradiating the surface of the test object 1 with a laser beam, a rotating table 21 for mounting and rotating the test object 1, a moving mechanism 22 for moving the rotating table in the moving direction of the test object 1, a plurality of light receivers 371-374 and 381-386 for receiving the scattered light obtained by scattering of the laser beam radiated to the surface of the test object 1 on the surface of the test object, and a data processor 52 for performing arithmetic processing based on the light receiving signal of the scattered light received by the plurality of light receivers and determining the boundary position Ep between the flat plane region of the surface of the test object 1 and the predetermined region 10 corresponding to the edge part departing from the plane region. COPYRIGHT: (C)2008,JPO&INPIT
|
