| 摘要 |
The group creation part divides n ion particles into groups of a group G<SUB>1</SUB>, a group G 2 , . . . , and a group G<SUB>k</SUB>. The individual area setting part sets an initial condition calculation area 1 a, as an individual area of the group G<SUB>1</SUB>, and makes the calculation part calculate movement of the ion particle. Then, one by one, the individual area setting part sets an individual area of a group G<SUB>i+1</SUB>, based on a range Rp, a dispersion sigmaL, etc. indicating a calculation result of an ion particle belonging to the group G<SUB>i</SUB>. Further, the individual area setting part implants an ion particle belonging to the group G<SUB>i+1 </SUB>into the individual area of the group G<SUB>i+1 </SUB>and makes the calculation part calculate movement of the implanted ion particle.
|
