发明名称 |
Surface acoustic wave device |
摘要 |
A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.
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申请公布号 |
US7423365(B2) |
申请公布日期 |
2008.09.09 |
申请号 |
US20050139040 |
申请日期 |
2005.05.27 |
申请人 |
FUJITSU MEDIA DEVICES LIMITED;FUJITSU LIMITED |
发明人 |
TSUTSUMI JUN;INOUE SHOGO;UEDA MASANORI |
分类号 |
H01L41/08;H03H9/00;H03H9/08;H03H9/145;H03H9/25;H03H9/64;H03H9/72 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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