发明名称 WIRE BONDING PRETREATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a wire bonding pretreating method performing wire bonding well performed in a posterior process even when gold plating performed on a work substrate is thinned further. SOLUTION: Before the wire bonding is performed on an electrode forming nickel plating on a thin film metal barrier used as the uppermost surface layer on a substrate such as an IC board, acid radical and hydroxyl group forming oxidation product of nickel being a trace quantity on the surface layer of the electrode are reduced and removed.
申请公布号 JP2002203870(A) 申请公布日期 2002.07.19
申请号 JP20000404732 申请日期 2000.12.28
申请人 MORI ENGINEERING:KK 发明人 SAITO MIYUKI;MIURA SHUNJI;SAKURAI RIKUO
分类号 H01L21/60 主分类号 H01L21/60
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