| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion milling apparatus and a method of ion milling processing which make unnecessary time and effort of resetting a sample in a sample stage mechanism whenever a processing region is changed. SOLUTION: The ion milling apparatus includes an ion gun generating an ion beam for being irradiated to a sample, a sample chamber housing the sample, within which an irradiation processing by the ion beam is carried out, an exhaust apparatus exhausting in order to keep the sample chamber vacuum, a gas injection mechanism injecting gas for generating ions, and a sample stage mechanism setting and rotating the sample. The sample stage mechanism includes a rotary table carrying and rotating the sample, a rotating mechanism driving the rotary table, an eccentric mechanism capable of eccentrically adjusting a positional relationship between a rotation center axis of the rotary table and a centerline of the ion beam, and a sample position adjusting mechanism capable of eccentrically adjusting a positional relationship between a centerline of the sample set on the sample stage and the rotation center axis of the rotary table. COPYRIGHT: (C)2008,JPO&INPIT
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