发明名称 SCRUBBER BOX AND METHODS FOR USING THE SAME
摘要 A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
申请公布号 US2008210258(A1) 申请公布日期 2008.09.04
申请号 US20080102846 申请日期 2008.04.14
申请人 APPLIED MATERIALS, INC. 发明人 YUDOVSKY JOSEPH;TEPMAN AVI;REYNOLDS KENNETH R.;ACHKIRE YOUNES;MAROHL DAN A.;GHANAYEM STEVE G.;POLYAK ALEXANDER S.;ETTINGER GARY;ZHANG HAOCHUAN;CHEN HUI
分类号 B08B7/00;A47L25/00;B08B1/04;H01L21/00 主分类号 B08B7/00
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