| 发明名称 |
Piezoelectric thin film device and method for manufacturing the same |
| 摘要 |
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
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| 申请公布号 |
US7420320(B2) |
申请公布日期 |
2008.09.02 |
| 申请号 |
US20070946913 |
申请日期 |
2007.11.29 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SANO KENYA;OHARA RYOICHI;YANASE NAOKO;YASUMOTO TAKAAKI;ITAYA KAZUHIKO;KAWAKUBO TAKASHI;TOYODA HIROSHI;HASUNUMA MASAHIKO;NAGANO TOSHIHIKO;ABE KAZUHIDE;NISHIGAKI MICHIHIKO;SHIBATA HIRONOBU |
| 分类号 |
H01H47/00;H01H51/22;H01L41/04;H01L41/047;H01L41/22;H03H3/02;H03H9/02;H03H9/15;H03H9/17 |
主分类号 |
H01H47/00 |
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