发明名称 Etched interposer for integrated circuit devices
摘要 In one embodiment, a package-to-package stack is assembled comprising a first integrated circuit package, and a second integrated circuit package which are mechanically and electrically connected using an interposer. In one embodiment, the interposer 106 includes columnar interconnects which may be fabricated by etching a conductive member such as copper foil, for example. In one application, the pitch or center to center spacing of the columnar interconnects may be defined by masking techniques to provide an interconnect pitch suitable for a particular application. In yet another aspect, etching rates may be controlled to provide height to width aspect ratios of the columnar interconnects which are suitable for various applications.
申请公布号 US7413995(B2) 申请公布日期 2008.08.19
申请号 US20040924396 申请日期 2004.08.23
申请人 INTEL CORPORATION 发明人 STERRETT TERRY L.;NATEKAR DEVENDRA
分类号 H01L21/44;H01L21/48 主分类号 H01L21/44
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