发明名称 |
VERFAHREN UND VORRICHTUNG ZUM ECR PLASMA AUFBRINGEN VON EINWANDIGEN KOHLENSTOFFNANORÖHREN SOWIE ERHALTENE NANORÖHREN |
摘要 |
Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and at least one electron cyclotron resonance area inside or at the border of the deposition chamber and facing the substrate, whereby dissociation and/or ionization of a gas containing carbon is caused, at a pressure of less than 10<SUP>-3 </SUP>mbars, in the magnetic mirror at the center of the deposition chamber, producing species that will be deposited on said heated substrate. The substrate surface includes raised and/or lowered reliefs. The invention concerns the SWNTs thus obtained. |
申请公布号 |
AT402118(T) |
申请公布日期 |
2008.08.15 |
申请号 |
AT20010982567T |
申请日期 |
2001.10.26 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
DELAUNAY, MARC;VANNUFFEL, CYRIL |
分类号 |
C01B31/02;C01B3/00;C23C16/26;C30B25/10;F17C11/00;H01J9/02;H01J37/32;H05H1/24;H05H1/46 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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