发明名称 Parallel-Beam Scanning for Surface Patterning of Materials
摘要 A system and method for parallel-beam scanning a surface. An energetic beam source emits an energetic collimated beam which is received by an optical device, comprising: one or more optical media, operable to receive the emitted beam, such as two pairs of coordinated mirrors or a right prism, and at least one actuator coupled to the one or more optical media, and operable to rotate each of the one or more optical media around a respective axis to perform a parallel displacement of the beam in a respective direction, wherein the respective direction, the beam, and the respective axis are mutually orthogonal. The optical device is operable to direct the beam to illuminate a sequence of specified regions of a surface.
申请公布号 US2008192316(A1) 申请公布日期 2008.08.14
申请号 US20080099642 申请日期 2008.04.08
申请人 WARNER RAYMOND M;MASTERSON EARL E;MILLAR LYNN;MACCRISKEN JOHN E;WILLIAMS MARK S 发明人 WARNER RAYMOND M.;MASTERSON EARL E.;MILLAR LYNN;MACCRISKEN JOHN E.;WILLIAMS MARK S.
分类号 G02B26/08 主分类号 G02B26/08
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