| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle monitoring system detecting fine particles. SOLUTION: In a bypass line 16 for connecting a chamber 11 to a DP 17, a laser beam oscillator 21 for applying laser beams, and a laser power measuring instrument 22 positioned on an optical path in laser beams L that are applied from the laser beam oscillator 21 and pass through the space in the bypass line 16, are arranged. Further, on the inner wall surface of the bypass line 16, a plurality of laser reflection mirrors 23 are arranged to reflect the laser beams L so that at least two optical paths of the laser beams L are positioned in the space in the bypass line 16. COPYRIGHT: (C)2008,JPO&INPIT
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