METHODS AND APPARATUS FOR SENSING SUBSTRATES IN CARRIERS
摘要
In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.
申请公布号
WO2008079239(A3)
申请公布日期
2008.08.14
申请号
WO2007US25962
申请日期
2007.12.19
申请人
APPLIED MATERIALS, INC.;KOSHTI, SUSHANT, S.;ENGLHARDT, ERIC, A.;SHAH, VINAY, K.
发明人
KOSHTI, SUSHANT, S.;ENGLHARDT, ERIC, A.;SHAH, VINAY, K.
