| 摘要 |
<p>Techniques for generating reactions on surfaces that can operate at room temperature and pressure with visible laser light as a radiation source and environmentally sound gases for processing. The apparatus is highly compact, simple, reliable and low cost to operate and maintain, and can dry clean and condition surfaces without causing damage or leaving a residue. Gas is injected at one end of a plenum, directed through the plenum in the presence of the laser radiation, and exhausted at the other end. The plenum creates a highly confined space for directional laminar movement of gas, laser light and by-products, permitting a high degree of uniformity and reaction efficiency. Minimal internal surface area and volume of the reactor prevents by-products from forming, eliminating costly cleaning and downtime.</p> |
