| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-purity trialkylindium and its production method. SOLUTION: The high-purity trialkylindium is characterized by having a silicon atom content of 0.3 ppm by mass or less, an oxygen atom content of 5.0 ppm by mass or less and a hydrocarbon content of 50 ppm by mass or less. The high-purity trialkylindium is produced by reacting a trihalogenoindium, a trialkylaluminum and a trialkylamine and forming a complex for a high boiling point and then distilling trialkylindium from the reaction mixture. The reaction mixture obtained by further reacting with a trialkylamine is subjected to sublimation or distillation to obtain a trialkylindium. COPYRIGHT: (C)2008,JPO&INPIT
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