| 摘要 |
A cassette system is provided to load substrates having a large area without drooping and to carry in or out the substrates freely in a desirable layer. A cassette system(100) is composed of: a conveyor type cassette(110) for moving substrates(S) in a predetermined direction while equally supporting several spots of the substrate over the front surface of the substrate; a cassette frame(120) for supporting each conveyor type cassette to stack plural conveyor type cassettes at regular intervals; a height adjusting unit(130) combined with the lower part of the cassette frame to adjust the height of the cassette frame; and a driving unit(140) installed at one side of the cassette frame to drive the conveyor type cassette moving at the same height by the height adjusting unit.
|
