| 摘要 |
<p>To achieve clean process environment, low vibration for suppressing vibration transmitting to substrates, smooth and agile transfer drive and highly accurate floating position. A transfer apparatus (10) transfers a transfer material (30) on a substantially flat transfer surface (50a). The transfer apparatus is provided with a transfer table (50); a plurality of first recessed sections (90), which have a jetting means (90a) for jetting a gas and are opened on the transfer surface; and a plurality of second recessed sections (110), which have a suction means (110a) for sucking the gas, and are opened on the transfer surface (50a). The second recessed section (110) is provided with a driving means (130) which protrudes from the transfer surface of the transfer table (50) to be in contact with the transfer material and drives the material in a transfer direction. In a transfer method for transferring a thin-board-like substrate (30) substantially parallel to the transfer surface (50a) in a substantially non-contact manner on a flat transfer surface (50a), the substrate (30) is supported on the transfer surface (50a) by having a gas in between, and the substrate is driven by bringing a part of the lower surface of the substrate (30) into contact with the driving means (130) which drives the substrate in the transfer direction.</p> |
