发明名称 MICRO BALL FEEDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a feeding method for finer pitches to reliably and efficiently feed conductive balls into through holes of a mask. <P>SOLUTION: The feeding method according to the present invention uses a head 300 that is movable on a feed mask 200, and gives an orientation to the micro ball 340 by a squeegee 310 that rotates around a supply port 320 from which the micro ball 340 is supplied to thereby feed the micro ball 340 into a plurality of through holes 210 formed on the feed mask 200. At that time, the head 300 is moved while being vibrated, thus increasing the probability for the micro ball 340 to meet the through holes 210 of the feed mask 200 to thereby feed the micro ball into the through holes 210. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008182117(A) 申请公布日期 2008.08.07
申请号 JP20070015422 申请日期 2007.01.25
申请人 TEXAS INSTR JAPAN LTD 发明人 AOYA KENGO
分类号 H01L21/60;H05K3/34 主分类号 H01L21/60
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