发明名称 ELECTRONIC DEVICE INCLUDING A SEMICONDUCTOR FIN HAVING A PLURALITY OF GATE ELECTRODES AND A PROCESS FOR FORMING THE ELECTRONIC DEVICE
摘要 An electronic device can include a semiconductor fin with a first gate electrode adjacent to a first wall, and a second gate electrode adjacent to a second wall. In one embodiment, a conductive member can be formed overlying the semiconductor fin, and a portion of the conductive member can be reacted to form the first and second gate electrodes. In another embodiment, a patterned masking layer can be formed including a masking member over a gate electrode layer, and portion of the masking member overlying the semiconductor fin can be removed. In still another embodiment, a first fin-type transistor structure can include the semiconductor fin, the first and second gate electrodes, and a first insulating cap. The electronic device can also include a second fin-type transistor structure having a second insulating cap thicker than the first insulating cap.
申请公布号 US2008185654(A1) 申请公布日期 2008.08.07
申请号 US20070670833 申请日期 2007.02.02
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 MATHEW LEO;GOOLSBY BRIAN J.;STEPHENS TAB A.
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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